Lithography & Nanostructures
E-Beam lithography
- state of the art 100 keV high resolution electron beam lithography system with high resolution laser inferometer stage
- nanometer precise patterns over large areas
- precision marks for exact positioning
- patterning of distributed feedback grating for single mode lasers
- micro- and nanostructures with dimensions down to 10 nm on wafer-like substrates with diameters up to 6"
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Nanostructure development
We offer tailor made nanostructures for your successful research and development, using a wide range of technologies including
- molecular beam epitaxy of quantum well or quantum dot structures
- electron beam lithography
- dry etching
- metallization, insulation and planarization