Complex Multilayer Coating

Complex multilayer coatings based on a variety of dielectrics or metals such as
SiO2, TiO2, Al2O3, Si3N4, AIN, TIN, BaF2, Si, Au, Cr, Ni, Pt and Ti for the realization of:

  • highly reflective or anti-reflective coatings
  • optical filters
  • electrical and thermal insulation
  • electrical contact layers
  • planarization

Deposition technologies:

  • ion beam sputtering
  • magnetron sputtering
  • thermal evaporation
  • electron beam evaporation
Figure 1: nanoplus electron beam evaporation system
nanoplus electron beam evaporation

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